I'll give you another quick run-down of the aforementioned models with some of the things you are looking for.
My general statement about zero rust and nice interior, you get what you pay for.
E36 M3: Fun to drive in stock form. Not a lot of power but handles very well and has enough to dump the clutch and get slidewayz whenever. Driver oriented, not many electronic aides. Fairly reliable as long as it has been maintained. Coolant systems aging are a common problem, lots of cracked and broken plastic reservoirs. It's a "common" maintenance thing is to replace some of the cooling system components that have aged. If you find an enthusiast that is selling, this probably was already done, but I would ask/ pay attention to that if you go see the car. Finding a nice e36 M3 interior can be challenging as the vader sport seats in good condition can hike up the value of the car. Worn bolsters are a common thing (like any car with semi aggressive side bolsters.) You'll find a lot of worn seats looking for an e36 M3, mint interiors usually bring a premium for these cars. I've seen them go from as low as 4k and as high as 15k+ depending on exterior/ interior color combo and condition.
E39 M5: Fun to drive in stock form, especially with a muffler delete (which will not drone, I owned one and within 24 hours had a shop chop off my mufflers and put straight pipes in, I still had resonators and if you ask anyone on the m5 boards or anyone that heard my car, it sounds fucking awesome. (Its one of the most common mods) And daily driving with no drone is fucking awesome. Drivers car, two buttons, sport mode on or off, and tcs on or off. It only comes in 6spd manual. This car for how large it is, behaves very well when sideways. I took mine up to 165 with 2 other people in the car and it still had some to go. I had the muffler delete and a tune that removed the limiter. Coolant system like the e36 should be overhauled. Mine was done shortly before I bought it. Rod bearings in the early 2000's were a larger issue than in 2001-2003. Stay away from 2000's M5. Mine was a 2001 and was great. Black-stone analysis is a great idea with these cars as it will warn you about the rod bearings before they become an issue. Vanos can sometimes be an issue as well. That's another one of those "fix it before it becomes an issue". Depending on miles, you may need a clutch, which are cheap. Labor is labor for that if you don't do it yourself. Again, you get what you pay for in terms of interior. These cars price depending on the interior/exterior color combo and condition. These seem to have higher price hikes depending on the color combo. For example, Alpine white was a rare exterior color, so any Alpine white on any interior color will be "worth" more than lets say jet black on black. There are also 2 packages, extended leather and standard. I'd go extended leather or you might as well buy a 540. Extended leather is nice, hand stitched leather dash and a bunch of other stuff. Really sets off the interior. Low mileage e39 M5's will bring a premium. Depending on condition these are going for $8-$45k. Check out Enthusiast Auto in Cincinnati for some of the best condition'd used bmw's ever. BUT YOU WILL PAY ENTHUSIAST AUTO PRICES. Which are retarded, but they have some of the best low milage e39's anywhere. But you are going to pay $30k+ for a 2001-2003 BMW lol.
E46 M3: Fun to drive in stock form. Comes in 6spd or smg. The SMG's need beat on every once in a while or the SMG pump will fail prematurely. SMG pump is a common maintenance item regardless. Same 2 buttons as the e39 M5. It's still a drivers car. Same thing about the coolant system. Rod bearings are a thing to keep an eye on. These only come in coupes. Have various trim levels and packages. You'll find these anywhere from $8-$25k.
E46 ZHP: Fun to drive in stock form. Doesnt quite have all the umph of the e46 m3 but you can get this with 2 or 4 doors. They still look good. Come with various interior packages and exterior color combos. Coolant system. The gearing is good (like in most performance bmw's) so the lack of power when compared to the m3 isnt so noticeable. You'll find these from $7-$20k depending on miles and condition.
E60 M5: Probably the most expensive to own on the list. A lot of it has to do with the fact it a v10. More spark plugs to change, etc. Again, smg pump. Vanos. Cooling system. Has tcs off and on as well as sport mode. Comes in SMG or 6spd. Interior/exterior color combo's dont change the pricing as much as the e39's. You can find these anywhere from $10-$30k depending on miles and condition. The sound these make, make up for all the extra monies you spend/ spent, almost.
E90 M3: Fun to drive in stock form. Come in smg or 6spd. SMG pump. Cooling system. Sound it makes is fantastic. Gotta love German V8's. Color combo can sometimes come into play. Comes in various trim levels and packages. These have "held" value fairly well. You can find em for $12k-$30k depending on miles and condition.
Obviously I personally wouldn't buy any of these vehicles on the low end of the price range unless you are ok with putting some more money into the car to make it reliable for you. Pricing also depends on how much maintenance the vehicle has had recently and being able to track historical maintenance is always a bonus.